| 摘要 |
<P>PROBLEM TO BE SOLVED: To separate and take out thin film members with hard-to-separate cuts one by one. Ž<P>SOLUTION: A device for taking out the thin film members FT is provided with a plurality of suction parts 98 with suction ports 98a formed in their front ends, that are supported so as to be contacted and separated relative to the top surface out of the plurality of thin film members 8 with the cuts stacked in a storage part 26, a separating direction moving member 92 moving the respective suction parts 98 toward an asymmetric direction for separating the thin film members 8, and a contacting/separating direction moving member 82 moving the suction parts 98 toward a contacting/separating direction for contacting or separating the suction parts 98 relative to the stacked thin film members 8. The thin film member 8 stacked on the top surface is sucked to the suction parts 98 by suction of gas, and taken out by separation of the suction parts 98 from the storage part 26 in a condition approximated to each other. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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