METHOD FOR MANUFACTURING PIEZOELECTRIC VIBRATOR, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC APPARATUS, AND WAVE CLOCK

摘要

A piezoelectric vibrator includes a tuning-fork type piezoelectric vibrating strip equipped with a pair of vibrating arm parts, a package housing the piezoelectric vibrating strip, and adjustment films formed along the longitudinal direction of the vibrating arm parts correspondingly to the vibrating arm parts, wherein a degree of vacuum inside the package can be increased by evaporating a part of the adjustment films through irradiation of a laser onto the adjustment films. A method for manufacturing the piezoelectric vibrator has a frequency measurement step to measure frequency of the piezoelectric vibrating strip, and a gettering step, wherein a part of the adjustment films located correspondingly to the top-end side of the vibrating arm parts is evaporated when the measured frequency is above the tolerance, while a part of the adjustment films located correspondingly to the base side of the vibrating arm parts is evaporated when the measured frequency is below the tolerance.