CERAMIC HEATER, METHOD FOR MANUFACTURING THE SAME, AND APPARATUS FOR DEPOSITING A THIN FILM INCLUDING THE SAME

摘要

PURPOSE: A ceramic heater, a method for manufacturing the same, and an apparatus for depositing a thin film including the same are provided to prevent unnecessary power consumption by supplying a driving power to a first radiation layer. CONSTITUTION: A ceramic heater comprises a plate(20), a first heating layer(30), a second heating layer(40), and a connecting member(50). The plate is formed with a ceramic material of the insulating property. The substrate is placed on the top side of the plate. The first heating layer is built in the plate. The second heating layer is built in the plate. The second heating layer is connected to an external power supply unit. The drive power is supplied to the second heating layer through the external power supply unit. The connecting member supplies the drive power from the second heating layer to the first heating layer.