| 摘要 |
The phase plate is made of a thin film (8d - 8f) that is partially permeable to electron beams. The thin film is made of an electrically conducting material, and is connected to a predetermined electric voltage (12a - 12c), and has penetration openings (9a - 9c). The thin film is made of amorphous, electrical conductive material, such as gold, aluminum, silver, platinum, titanium and its alloys. |
