| 摘要 |
PROBLEM TO BE SOLVED: To provide a lamp in which a plurality of flash lamps can be fixed by reducing load to an arc tube even if the lamps are closely arranged and fixed on the same plane, and to provide an annealing device with which maintenance can easily be performed without causing damage of the lamp in an early stage and with less frequency of lamp exchange and which can instantaneously heat only a surface of a wafer. SOLUTION: The lamp is provided with the flash lamp 1 where a pair of electrodes 21 and 22 are oppositely arranged in the arc tube 10 in which end walls 11 are formed on both ends of a cylindrical tube formed of quartz glass and are sealed, and lead bars 23 connected to the electrodes 21 and 22 are derived from the end walls, and with almost cylindrical bases 40A and 40B mounted on ends of the arc tube 10. Shrinkage parts 12 smaller than an outer diameter in a region between the electrodes of the arc tube 10 are formed in outer regions in longitudinal direction compared to the electrodes 21 and 22 at the ends of the arc tube 10, and a base which is below the outer diameter is fixed by adhesive 30. COPYRIGHT: (C)2005,JPO&NCIPI |
