APPARATUS FOR SEALING AIRTIGHT CHAMBER AND ASSEMBLY OF AIRTIGHT CHAMBER AND ASSEMBLY OF CHAMBER FOR NANO IMPRINTING LITHOGRAPHY HAVING THE APPARATUS, AND METHOD FOR IMPRINTING USING THE ASSEMBLY

摘要

PURPOSE: An apparatus for sealing an airtight chamber and an assembly of airtight chamber and assembly of a chamber for nano imprinting lithography having an apparatus are provided to improve airtight of the chamber by installing a sealing member for the airtight chamber. CONSTITUTION: A sealing apparatus for a closed chamber comprises a sealing member(110) and a gas supply source(130). The sealing member is installed within the first chamber(51) or the second chamber(52). The sealing member has an internal space. The first chamber or the second chamber provides a board processing space. A gas supply unit supplies the gas to an internal space of the sealing member. The gas supply source discharges the gas from the internal space of the sealing member.