| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic clamp mechanism and an electrostatic clamp method which can shorten the time required for transition between clamp condition and nonclamp condition. SOLUTION: This electrostatic clamp device has a pair of clamp electrodes 105 and 106 which are arranged to oppose each other across insulating material, and a clamp voltage generation means 111 and 112 which generates voltage to be applied between the clamp electrodes, and the clamp voltage generation means is equipped with such constitution that it generates stipulated voltage after having generated voltage higher than the stipulated voltage for a given time. |
