,申请号JP20060512090-传众专利搜索

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发明名称
摘要
申请公布号	JP4423289(B2)	申请公布日期	2010.03.03
申请号	JP20060512090	申请日期	2005.04.05
申请人		发明人
分类号	H01L21/304;B08B1/04;H01L21/00	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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