GUIDE DEVICE AND CLEANING APPARATUS OF WAFER HAVING THE SAME

摘要

PURPOSE: A guide device and a cleaning apparatus of a wafer having the same are provided to prevent the separation of a wafer slot by changing a wafer guide structure. CONSTITUTION: A guide apparatus is accommodated to a cleaning bath(10). The cleaning bath accepts a cleaning solution. The cleaning solution washes the wafer(1). The guide apparatus comprises a guide body(100) and a plurality of guides(200). The guide body is accepted inside the cleaning bath. A plurality of guides comprises a plurality of slots. A plurality of slots accepts a part of a plurality of wafers. The wafer is supported by the slot.