发明名称 |
Mask for thin film deposition and method of manufacturing OLED using the same |
摘要 |
A mask (10) for thin film deposition used in forming an organic thin film or a conductive layer in an organic light emitting device is disclosed. In one embodiment, the mask (10) includes i) a base member (11), ii) a plurality of slits (13) configured to penetrate through the base member (10), wherein the plurality of slits (13) have a predetermined length and extend in a first direction, wherein the plurality of slits (13) comprise an outermost slit (14) positioned in an outermost in a second direction having a predetermined angle with respect to the first direction, and wherein the outermost slit (14) comprises two sub-slits separated from each other and iii) a rib supporting part (17) formed between and contacting the two sub-slits, wherein the rib supporting part (17) extends from a rib which is adjacent to the outermost slit. |
申请公布号 |
EP2159299(A2) |
申请公布日期 |
2010.03.03 |
申请号 |
EP20090161245 |
申请日期 |
2009.05.27 |
申请人 |
SAMSUNG MOBILE DISPLAY CO., LTD. |
发明人 |
SUNG, DONG-YOUNG;KIM, HONG-RYUL |
分类号 |
C23C14/04;G03F1/00;H01L51/00;H01L51/50;H05B33/10 |
主分类号 |
C23C14/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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