发明名称 Mask for thin film deposition and method of manufacturing OLED using the same
摘要 A mask (10) for thin film deposition used in forming an organic thin film or a conductive layer in an organic light emitting device is disclosed. In one embodiment, the mask (10) includes i) a base member (11), ii) a plurality of slits (13) configured to penetrate through the base member (10), wherein the plurality of slits (13) have a predetermined length and extend in a first direction, wherein the plurality of slits (13) comprise an outermost slit (14) positioned in an outermost in a second direction having a predetermined angle with respect to the first direction, and wherein the outermost slit (14) comprises two sub-slits separated from each other and iii) a rib supporting part (17) formed between and contacting the two sub-slits, wherein the rib supporting part (17) extends from a rib which is adjacent to the outermost slit.
申请公布号 EP2159299(A2) 申请公布日期 2010.03.03
申请号 EP20090161245 申请日期 2009.05.27
申请人 SAMSUNG MOBILE DISPLAY CO., LTD. 发明人 SUNG, DONG-YOUNG;KIM, HONG-RYUL
分类号 C23C14/04;G03F1/00;H01L51/00;H01L51/50;H05B33/10 主分类号 C23C14/04
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