APPARATUS FOR FORMING A NANO-PATTERN AND METHOD FOR FORMING A NANO-PATTERN

摘要

PURPOSE: An apparatus for forming a nano-pattern and a method for forming a nano-pattern are provided to an excellent micro-pattern by pressing a stamp and a substrate through pressure difference. CONSTITUTION: A fine pattern formation apparatus(100) comprises chambers(111,113), a stage(140), a stamp lifting unit(160), and a stamp presser portion(170). The chamber forms a process space. The stage supports the substrate(10). The pattern film is formed on the substrate. The stamp lifting unit supports the edge part of the stamp(20). The stamp lifting unit raises the stamp. The stamp presser portion pressurizes the edge part of the stamp.