发明名称 MANUFACTURING METHOD OF GRAIN ORIENTED ELECTRICAL STEEL SHEET
摘要 PURPOSE: A method of manufacturing a grain oriented electrical steel sheet is provided to reduce a defect by a mechanical stress using a groove on the steel sheet through lithography and an etching process. CONSTITUTION: A method of manufacturing a grain oriented electrical steel sheet comprises the following steps: forming a hard mask pattern on the steel sheet; and forming a groove on the steel sheet by performing a wet etching using the hard mask pattern as a etching barrier. The grain oriented electrical steel sheet comprises silicon. The hard mask pattern comprises a nitride film.
申请公布号 KR20100022864(A) 申请公布日期 2010.03.03
申请号 KR20080081576 申请日期 2008.08.20
申请人 HYNIX SEMICONDUCTOR INC. 发明人 SHIN, SU BUM
分类号 C23F1/02 主分类号 C23F1/02
代理机构 代理人
主权项
地址
您可能感兴趣的专利