Method for depositing a material

摘要

The invention relates to a method for depositing a material of a target (3) onto a surface of a sample (2), which method comprises the steps of:
- irradiating a surface of the target with a laser or electron beam (7) to generate a plume (9) of target material particles;
- positioning the sample (2) near the plume, such that the target material particles are deposited onto the surface of the sample;
- rotating the sample around a rotation axis (1) being perpendicular to the surface of the sample onto which the particles are deposited;
- moving the laser beam along the surface of the target, such that the plume moves in a radial direction in relation to the rotation axis;
- pulsing the laser beam at a variable frequency.