| 摘要 |
FIELD: measurement equipment. ^ SUBSTANCE: invention is related to the field of measurement equipment, in particular to microelectronic sensors - chemical and biosensors, which are intended for simultaneous acoustic (on surface-acoustic waves (SAW)) and optical investigations of physical-chemical and (or) medical-biological properties of fine nanofilms of around 0.1 mcm (100 nm) and below. Sensor uses light of visible range, for which absorption coefficient are 2-4 orders more than in infrared range, waveguide mode of measurement, in which single crystal of piezoelectric cell is used as flat waveguide for light of visible range, besides two modes of optical waveguide measurements are available: MNPVO or multiple reflecting-absorbing one, and also heater in the form of several chip-resistors, which are connected into serial circuit, and temperature detector - platinum resistance thermometre. ^ EFFECT: improved sensitivity and simplified design. ^ 4 dwg, 1 tbl |
