APPARATUS AND METHOD FOR INSPECTING A PROBE

摘要

PURPOSE: A device and a method for inspecting a probe are provided to quickly inspect a fine probe of a micro unit by determining the normal status of the probe using the image of the probe. CONSTITUTION: A probe inspection apparatus(100) includes a transfer unit(110), an inspection unit(120), a cut unit(130), and a controller(140). The transfer unit transfers a sheet(10) with a plurality of probes. The inspection unit inspects the transferred probe. The cut unit is equipped on the rear of the inspection unit. The probes are separated from the sheet by cutting the connection unit between the sheet and the probes. The controller selectively cuts the connection unit between the sheet and the probe according to the inspection result of the inspection unit.