| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide methods for inspecting capacitors and inductors built in a substrate as passive elements which can discriminate defective built-in elements from among the built-in elements without increasing man-hours. <P>SOLUTION: The method for inspecting capacitors in a substrate, having a lower electrode and two capacitor electrodes provided to face an insulating layer made of a high dielectric constant material, in which the two capacitor electrodes are provided on the same surface of the substrate, in which the two capacitor electrodes are equal in area, and in which the lower electrode and each capacitor electrode are not connected through a via hole, includes: bringing a terminal of a signal line of a measuring probe into contact with one of the two capacitor electrodes; bringing a terminal of a ground line of the measuring probe into contact with the other capacitor electrode; and measuring impedance, the measuring probe having two terminals, namely the terminal of the signal line and the terminal of the ground line. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
