RADIATION SOURCE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a radiation source can generate a high-quality and stable radiation output, using a radiation beam.

SOLUTION: The radiation source includes a beam generator for generating a radiation beam used to generate the radiation output of the radiation source, and a beam monitor for monitoring the radiation beam. The radiation source is included in a lithographic apparatus. The device manufacturing method includes generating a first type radiation using a second-type radiation beam, monitoring the quality of the second-type radiation and projecting the radiation beam with a first-type pattern onto a substrate.

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