| 摘要 |
PROBLEM TO BE SOLVED: To provide a diameter broadening circuit of an optical waveguide which is manufactured in a simple process, largely broadens a light spot size with a small size and gives a high coupling efficiency, to provide a method of manufacturing the circuit and an optical waveguide type apparatus. SOLUTION: The diameter broadening circuit of an optical waveguide includes: a supporting substrate layer 1; an oxide film layer 2; an optical waveguide layer 3a formed of a single crystal silicon film; a grating 3b; an over clad layer 4 so formed as to cover the optical waveguide layer 3a and the grating 3b; a light reflection film 5 of which the over clad layer 4 side is a light reflection face; and an antireflection film 6 which suppresses the reflection of light on the lower face of the supporting substrate layer 1, wherein the outward end part of the optical waveguide layer 3a is a first input/output end 7 and the lower face of the antireflection film 6 is a second input/output end 8 which inputs and outputs light and has a diameter larger than that of the first input/output end 7. COPYRIGHT: (C)2010,JPO&INPIT |
