| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow rate measuring device capable of simply measuring the flow rates of fluids having a plurality of different measurement ranges without affecting the cleanliness of the fluids to be measured regardless of a single device. SOLUTION: In the flow rate measuring device 10A, a differential pressure type flow sensor 20A is connected to a main passage 11 via primary- and secondary-side pressure flow passages 12, 13. The differential pressure type flow sensor 20A includes: an intermediate compartment 22 arranged between first and second diaphragms 30, 35 oppositely disposed at both the ends of a shaft 36 and has an intermediate diaphragm 26 for dividing first and second chambers 23, 24; an operation section C for converting a signal from a load detection sensor 40 for detecting the back pressure of the first diaphragm to a flow rate signal; a pressure loss section 50 for generating a differential pressure between the chambers 23, 24; and an on/off valve 60 provided in the main passage 11 between points to which the respective pressure flow passages 12, 13 are connected. COPYRIGHT: (C)2010,JPO&INPIT
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