| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a means capable of efficiently and precisely specifying the generation position and the generation time of electrostatic discharge generated at an optional measurement region. Ž<P>SOLUTION: A visible laser range finder capable of adjusting irradiation angle is set at an optional place around the measurement region. With the measurement reference point of the range finder as a detection reference position, receiving antennas are arranged at four or more places where the angle and the distance to the detection reference point are precisely determined based on the laser light of the range finder and the distance information. Then, the time difference in attaining of the electromagnetic wave accompanied with the electrostatic discharge generated in the measurement region at each antenna is analyzed to obtain the intersection of three or more hyperbolas obtained between the receiving antennas set on the different planes, and the position information of the electrostatic discharge generation position with respect to the detection reference point is computed. Then, the electrostatic discharge generation position is predetermined by adjusting the irradiation angle or the distance to the laser light reflection plate of the visible laser range finder set at the detection reference point to attain the laser light at the computed electrostatic discharge generation point. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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