发明名称 LIQUID DROPLET EJECTING HEAD, LIQUID DROPLET EJECTING APPARATUS, AND MANUFACTURING METHOD FOR LIQUID DROPLET EJECTING HEAD
摘要 <P>PROBLEM TO BE SOLVED: To provide a liquid droplet ejecting head which enables an ink ejection amount from each nozzle to be stable, and nozzles and ejection chambers to concentrate and be in a multi-row arrangement. Ž<P>SOLUTION: The liquid droplet ejecting head includes: a nozzle substrate 30 in which the a nozzle 31 for ejecting liquid droplets is formed; a cavity substrate 20 in which an ejection chamber 21 communicating with the nozzle 31 is formed and an individual electrode 24 is formed on a bottom wall of the ejection chamber 21 to be a diaphragm 22; an electrode substrate 10 in which a common electrode 11 which drives the diaphragm 22 is formed in at least a range opposed to the diaphragm 22; and a spacer layer 25 which is equipped between the cavity substrate 20 and the electrode substrate 10, and forms a gap between the diaphragm 22 and the common electrode 11. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2010042528(A) 申请公布日期 2010.02.25
申请号 JP20080206260 申请日期 2008.08.08
申请人 SEIKO EPSON CORP 发明人 OTANI KAZUFUMI;MATSUSHITA TOMONORI
分类号 B41J2/045;B41J2/055 主分类号 B41J2/045
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