发明名称 |
SEMICONDUCTOR PHOTORECEPTOR, OPTICAL COMMUNICATION DEVICE, OPTICAL INTERCONNECT MODULE, PHOTOELECTRIC CONVERSION METHOD |
摘要 |
Provided is a semiconductor photoreceptor which has high speed, high efficiency, and little dependence on the polarization direction of the incident light. The semiconductor photoreceptor is comprised of a semiconductor layer including a light absorption layer (4); a metal-semiconductor-metal (MSM) electrode (1) which is positioned on the semiconductor layer, forms a Schottky junction with the semiconductor layer, and has a slit opening; a reflection prevention film (2) which is formed on the semiconductor layer and the MSM electrode (1); and a Bragg reflector multi-layered film (6) which is provided in the lower part of the semiconductor layer. The MSM electrode (1) has a period which can induce surface plasmon for transverse magnetic (TM) polarized incident light and a thickness which can obtain satisfactory transmittance of transverse electric (TE) polarized incident light. |
申请公布号 |
WO2010021073(A1) |
申请公布日期 |
2010.02.25 |
申请号 |
WO2009JP02859 |
申请日期 |
2009.06.23 |
申请人 |
NEC CORPORATION;OKAMOTO, DAISUKE;FUJIKATA, JUNICHI |
发明人 |
OKAMOTO, DAISUKE;FUJIKATA, JUNICHI |
分类号 |
H01L31/108 |
主分类号 |
H01L31/108 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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