发明名称 CONFIGURING OF LAPPING AND POLISHING MACHINES
摘要 A lapping or polishing machine includes a material having a first finishing surface to process a surface of a work item, a measuring tool to measure a contour of the first finishing surface, and a conditioning tool having a second finishing surface to process the first finishing surface to reduce a difference between the measured contour and a desired contour of the first finishing surface.
申请公布号 WO2009137685(A3) 申请公布日期 2010.02.25
申请号 WO2009US43153 申请日期 2009.05.07
申请人 ZYGO CORPORATION;HOON, DOUGLAS, MARTIN 发明人 HOON, DOUGLAS, MARTIN
分类号 B24B37/04;B24B13/00;B24B49/02;H01L21/304 主分类号 B24B37/04
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