发明名称 |
CONFIGURING OF LAPPING AND POLISHING MACHINES |
摘要 |
A lapping or polishing machine includes a material having a first finishing surface to process a surface of a work item, a measuring tool to measure a contour of the first finishing surface, and a conditioning tool having a second finishing surface to process the first finishing surface to reduce a difference between the measured contour and a desired contour of the first finishing surface. |
申请公布号 |
WO2009137685(A3) |
申请公布日期 |
2010.02.25 |
申请号 |
WO2009US43153 |
申请日期 |
2009.05.07 |
申请人 |
ZYGO CORPORATION;HOON, DOUGLAS, MARTIN |
发明人 |
HOON, DOUGLAS, MARTIN |
分类号 |
B24B37/04;B24B13/00;B24B49/02;H01L21/304 |
主分类号 |
B24B37/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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