| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To efficiently measure the resistivity of a transparent conductive film in a non-destructive and non-contact manner with high precision. <P>SOLUTION: This resistivity inspecting device is equipped with a light irradiation device 3 for irradiating the transparent conductive film formed on the light pervious substrate fed on a manufacturing line with P-polarized illumination light having a wavelength selected by an inspection condition selecting method performed in advance at the incident angle selected by the inspection condition selecting method from the film surface side of the transparent conductive film, a photodetector 2 for detecting the reflected light from the transparent conductive film, and an information processor 7 for calculating the evaluation value related to the quantity of the reflected light with respect to the selected wavelength on the basis of the intensity of the detected light and calculating the resistivity from the calculated evaluation value using correlation characteristics wherein the evaluation value and the resistivity are preliminarily related to each other. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
