发明名称 DEVICE AND PROCESS INCLUDING PINHOLE UNDERCUT AREA
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a new electronic device, in which adverse effects of pinholes are reduced, and a method of manufacturing the new electronic device. <P>SOLUTION: An electronic device includes a dielectric region 14 including multiple pinholes 90A each of which has an entry 92A and an exit 94A, and a lower conductive region 18. At least some of the pinholes 90A have, around the exit 94A, an overhanging surface 98A in the dielectric region 14 facing an undercut area 96A in the lower conductive region 18 wider than the exit 94A. <P>COPYRIGHT: (C)2010,JPO&INPIT</p>
申请公布号 JP2010045369(A) 申请公布日期 2010.02.25
申请号 JP20090187638 申请日期 2009.08.13
申请人 XEROX CORP 发明人 WU YILIANG;LIU PING;LI YUNING;PAN HUALONG
分类号 H01L29/786;H01L21/28;H01L21/283;H01L21/336;H01L21/822;H01L27/04;H01L29/41;H01L51/05 主分类号 H01L29/786
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