| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an angular velocity sensor having high durability against external impact and high detection accuracy. <P>SOLUTION: The angular velocity sensor 1 includes a base part 3, an oscillator part 2, a support part 16, and a shock absorbing part 15. The support part 16 is connected between the base part 3 and the oscillator part 2, supports the oscillator part 2, and has a width smaller than that of the base part 3. The shock absorbing part 16 is connected between the base part 3 and the support part 16, and has a thickness smaller than that of the base part 3 and a width equivalent to that of the base part 3. Because the support part 16 has the width smaller than that of the base part 3, the propagation of the vibration from the oscillator part 2 to the base part 3 is efficiently suppressed. Further, because the thickness of the shock absorbing part 16 is smaller than that of the base part 3, it is more easily bent than the base part 3. Thus, the stress acting on the support part 16 is efficiently mitigated. <P>COPYRIGHT: (C)2010,JPO&INPIT |
