| 摘要 |
PROBLEM TO BE SOLVED: To improve throughput when a heat treatment temperature of a heating module is changed between a substrate of a prior lot A and a substrate of a posterior lot B. SOLUTION: After delivering the last substrate of the prior lot A to a treatment part and until delivering the first substrate of the posterior lot B to the treatment part, a conveyance schedule is created so as to space a cycle for just the number of delay cycles obtained by dividing time required for a setting process by maximum time required when carrying out one conveyance cycle. After finishing a predetermined execution cycle and before starting a next cycle, an optimal time for executing the next cycle is determined for every setting object module, and if the optimal time is longer by comparing the longest optimal time and the execution time of the execution cycle, a main arm is controlled so as to delay starting of the next cycle of the execution cycle for just the time equivalent to a difference between the optimal time and the execution time. COPYRIGHT: (C)2010,JPO&INPIT |
