SELF-ALIGNED DOUBLE-SIDED VERTICAL MIM-CAPACITOR

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing an MIM (metal-insulator-metal) capacitor to reduce dimensions. SOLUTION: A vertical MIM capacitor includes first conductive lines 124 and second conductive lines sandwiched around a vertical portion of a capacitor dielectric. Additional conductive lines may be positioned vertically to the proximate first conductive lines 124 separated by another vertical portion of the capacitor dielectric to form a double-sided capacitor and increase a capacitance. A plurality of vertical MIM capacitors may be coupled together in parallel to increase the capacitance. COPYRIGHT: (C)2010,JPO&INPIT