COATING INSPECTION METHOD AND COATING INSPECTION APPARATUS, AND COATING APPARATUS

摘要

<P>PROBLEM TO BE SOLVED: To provide an in-line coating inspection method and coating inspection apparatus applicable even to thinly coating a transparent or semi-transparent substrate with a coating fluid and capable of monitoring a coating amount and uneven coating. Ž<P>SOLUTION: A method for inspecting a coating film coated on one side of the translucent substrate monitors a bead, a coating fluid pool formed between the substrate and a coating fluid supply means, from the other side of the coating fluid coated side. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž