| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a measurement apparatus capable of performing measurement, even if it is positioned close to a processing machine by preventing degradation in measurement accuracy by protecting the apparatus from the adhesion of oil mist and dust. Ž<P>SOLUTION: The measurement apparatus for measuring the shape of an object M to be inspected includes: a detection means (a shape sensor 20, a projection unit 21 and an imaging unit 22) for collecting shape information of the object M to be inspected; and an air-flow forming means (an air pump 30, an air hose 31, and air ducts 21d and 22c) for forming a flow of air in the periphery of a measuring part. The air-flow forming means includes: a charging mechanism (an inert gas supply part 47, an ionized gas generating part 48, and an inlet path 41) for charging impurity by spraying to an air supplied to the air flow forming means; a charged inert gas from a substantially perpendicular direction or the reverse direction to the flow of the air; a dust collecting means 40 having a dust collecting mechanism (a mesh member 42), charged in the reverse polarity to the polarity of the charged impurity, and separates the detection means from an atmosphere outside of the detection means, by allowing the air containing less impurity than the atmosphere via the dust-collecting means. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
|
