发明名称 LOCALIZED ANNEALING DURING SEMICONDUCTOR DEVICE FABRICATION
摘要 A process for the fabrication of semiconductor devices on a substrate, the semiconductor devices including at least one metal layer. The process includes, removing the substrate and applying a second substrate; and annealing the at least one metal layer by application of a beam of electromagnetic radiation on the at least one metal layer.
申请公布号 US2010047996(A1) 申请公布日期 2010.02.25
申请号 US20060158678 申请日期 2006.12.19
申请人 TINGGI TECHNOLOGIES PRIVATE LIMITED 发明人 YUAN SHU;LIN JING
分类号 H01L21/26;H01L21/30 主分类号 H01L21/26
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