| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric thin film vibrating reed for obtaining stable vibrations with minor loss. <P>SOLUTION: The piezoelectric thin film vibrating reed is provided with: a base 10; bar-shaped vibrators 20 and 21; and piezoelectric thin film vibration parts 30, wherein piezoelectric thin films 31 provided between the base 10 and the bar-shaped vibrators 20 and 21 face each other intersecting the direction C of a polarization axis of the piezoelectric thin films 31, one parts are connected to the base 10, and the other parts are sandwiched by counter electrodes 32 and 33 connected to the ends 22 of the bar-shaped vibrators 20 and 21. A vibration mode of the piezoelectric thin film vibration parts 30 is a vertical vibration mode in which the piezoelectric thin films 31 displace in the direction C of the polarization axis, and the extending direction B of the bar-shaped vibrators 20 ad 21 is a direction that goes almost along the direction C of the polarization axis of the piezoelectric thin films 31. <P>COPYRIGHT: (C)2010,JPO&INPIT |
