APPARATUS AND METHOD FOR REMOVAL OF SURFACE OXIDE VIA FLUXLESS TECHNIQUE INVOLVING ELECTRON ATTACHMENT AND REMOTE ION GENERATION

摘要

PROBLEM TO BE SOLVED: To provide an economical and efficient process for removing metal oxide from at least one component and/or solder surface under a relatively low temperature. SOLUTION: A method for removing oxide from the surface of a component 25 includes: providing at least one component 25 connected to a substrate wherein the substrate includes at least one potential of a grounded potential or a positive electrical potential to form a target assembly; making a gas mixture comprising a reducing gas 27 pass through an ion generator 21 comprising a first and a second electrode; supplying voltage to at least one of the first and second electrodes sufficient to form the negatively charged reducing gas; and contacting the target assembly with the negatively charged reducing gas to reduce the oxides on at least one component 25. COPYRIGHT: (C)2010,JPO&INPIT