发明名称 VACUUM VESSEL, VACUUM PROCESSING APPARATUS PROVIDED WITH THE VACUUM VESSEL, AND METHOD FOR PRODUCTION OF THE VACUUM VESSEL
摘要 PROBLEM TO BE SOLVED: To provide a vacuum vessel which is lightweight, requires a less material cost, can be produced comparatively easily and can be handled easily during transportation. SOLUTION: The vacuum vessel includes: a pair of bent members formed by bending two metal plates and connected to each other to form a closed space inside; one looped seal member which seals connecting portions of the pair of bent members; a structure arranged in the closed space to abut on an inner surface of the bent member; and a fastening member which connects the connecting portions of the pair of bent members. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010043352(A) 申请公布日期 2010.02.25
申请号 JP20090153960 申请日期 2009.06.29
申请人 CANON ANELVA CORP 发明人 SASAKI MASAO
分类号 C23C14/34;C23C16/44;H01L21/3065 主分类号 C23C14/34
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