| 摘要 |
PROBLEM TO BE SOLVED: To provide a transport mechanism which can perform the positioning of a plate-shaped material when the plate-shaped material is carried out from a housing. SOLUTION: The transport mechanism for the plate-shaped material has a support face for supporting the plate-shaped material, and a positioning member erected on the support face for carrying out the plate-shaped material housed in the housing which can house a plurality of the plate-shaped materials from the housing. The transport mechanism comprises: a pressing member for pressing the plate-shaped material housed in the housing to the positioning member to position the plate-shaped material; a chucking pad for chucking and holding the plate-shaped material; and a moving means connected to the pressing member and the chucking pad for moving the pressing member and the chucking pad in a straight line. After the plate-shaped material is pressed to the positioning member by the pressing member to position it, the plate-shaped material is chucked and held by the chucking pad, and the plate-shaped material chucked and held by the chucking pad is moved in a straight line by the moving means. COPYRIGHT: (C)2010,JPO&INPIT |
