发明名称 |
PRODUCTION CONTROL SYSTEM, PRODUCTION CONTROL METHOD, PRODUCTION CONTROL PROGRAM, AND HOST COMPUTER |
摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a production control system capable of carrying out manufacture by specifying a semiconductor manufacturing device with favorable manufacturing quality. <P>SOLUTION: The production control system is equipped with a host computer determining a selected manufacturing device from a plurality of semiconductor manufacturing devices (facility units 1-4) 51-54 and outputting conveyance instructions, a rank A type DB classifying semiconductor products into rank A types wherein dispersion of quality should be suppressed to a constant value or less and rank B types other than the rank A types and storing identifiers of the rank A types in correspondence to process conditions of the rank A types, and a facility unit number DB recording information indicating whether or not if each of the plurality of semiconductor manufacturing devices can manufacture the rank A types in the process conditions and quality information based upon quality of semiconductor products manufactured by each semiconductor manufacturing device in correspondence to each semiconductor manufacturing device. A semiconductor manufacturing device with favorable quality information based upon the quality information is determined as the selected manufacturing device from semiconductor manufacturing devices capable of manufacturing the rank A types in the process conditions of the semiconductor manufacturing devices. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
申请公布号 |
JP2010045115(A) |
申请公布日期 |
2010.02.25 |
申请号 |
JP20080207201 |
申请日期 |
2008.08.11 |
申请人 |
NEC ELECTRONICS CORP |
发明人 |
GOTO KOICHI;HAYASHIDA YOKO |
分类号 |
H01L21/02;G05B19/418 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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