发明名称 PRODUCTION CONTROL SYSTEM, PRODUCTION CONTROL METHOD, PRODUCTION CONTROL PROGRAM, AND HOST COMPUTER
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a production control system capable of carrying out manufacture by specifying a semiconductor manufacturing device with favorable manufacturing quality. <P>SOLUTION: The production control system is equipped with a host computer determining a selected manufacturing device from a plurality of semiconductor manufacturing devices (facility units 1-4) 51-54 and outputting conveyance instructions, a rank A type DB classifying semiconductor products into rank A types wherein dispersion of quality should be suppressed to a constant value or less and rank B types other than the rank A types and storing identifiers of the rank A types in correspondence to process conditions of the rank A types, and a facility unit number DB recording information indicating whether or not if each of the plurality of semiconductor manufacturing devices can manufacture the rank A types in the process conditions and quality information based upon quality of semiconductor products manufactured by each semiconductor manufacturing device in correspondence to each semiconductor manufacturing device. A semiconductor manufacturing device with favorable quality information based upon the quality information is determined as the selected manufacturing device from semiconductor manufacturing devices capable of manufacturing the rank A types in the process conditions of the semiconductor manufacturing devices. <P>COPYRIGHT: (C)2010,JPO&INPIT</p>
申请公布号 JP2010045115(A) 申请公布日期 2010.02.25
申请号 JP20080207201 申请日期 2008.08.11
申请人 NEC ELECTRONICS CORP 发明人 GOTO KOICHI;HAYASHIDA YOKO
分类号 H01L21/02;G05B19/418 主分类号 H01L21/02
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