| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a hoop cleaning and drying device that is easily carried in a manufacturing line of a semiconductor manufacturing factory without having its carry-in path limited, and facilitates replacing operations for respective parts. Ž<P>SOLUTION: The hoop cleaning and drying device 1 includes a load port section 4 having a mounting portion 3 for carrying in and out a hoop 2, a cleaning section 6 having a cleaning chamber 5 for cleaning and drying the hoop 2, and a conveying section 8 provided between the cleaning section 6 and load port section 4 having a conveying robot 7 for conveying the hoop 2. The load port section 4, cleaning section 6, and conveying section 8 are constituted as units having independent racks 10, 11 and 12. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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