| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a conveying device conveying a conveying object without newly providing the object with an exclusive region for holding and sucking by the conveying device. Ž<P>SOLUTION: This substrate conveying device 100 conveys a substrate 200 formed with hole parts 201. The substrate conveying device 100 includes locking equipment 140 which is provided to advance and retreat toward the substrate 200 and can be switched into a first state of inserting the locking equipment 140 into the hole part 201 from a first opening part of the hole part 201 located in a surface of the substrate 200 and a second state of engaging the locking equipment 140 to an opening edge part of a second opening part located on an opposite side of the first opening part in such a state as inserted into the hole parts 201. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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