LIQUID CRYSTAL ALIGNMENT LAYER DEPOSITED AND RUBBED BEFORE CREATING MICROSTRUCTURE

摘要

PROBLEM TO BE SOLVED: To provide a new method for forming cavities having a liquid crystal alignment layer. SOLUTION: The method for forming cavities 4 of a micro-optical device includes steps of: forming a liquid crystal alignment layer 12 subjected to a rubbing process on a surface plane of a support substrate 10; depositing a sacrificial protective layer on the liquid alignment layer 12; forming walls 6 of the cavities 4 by depositing and etching a resin layer on the sacrificial protective layer; and eliminating the sacrificial protective layer between the walls 6 of the cavities 4. COPYRIGHT: (C)2010,JPO&INPIT