发明名称 SEMI-RESONANT DRIVING SYSTEMS AND METHODS THEREOF
摘要 <p>A driving system in accordance with embodiments of the present invention includes a structure and a vibration system. The structure has at least one point to frictional couple to and drive a movable element in one of at least two directions. The structure also has at least two bending modes which each have a different resonant frequency. The vibration system applies two or more vibration signals which are at a vibration frequency to each of the bending modes of the structure. The vibration frequency is substantially the same as one of the resonant frequencies. At the vibration frequency one of the bending modes of the structure is vibrating substantially at resonance and the other of the bending modes of the structure is vibrating at partial resonance. The vibration system adjusts a phase shift between the two or more applied vibration signals to control which one of the at least two directions the moveable element is moved.</p>
申请公布号 WO2010022046(A1) 申请公布日期 2010.02.25
申请号 WO2009US54157 申请日期 2009.08.18
申请人 NEW SCALE TECHNOLOGIES 发明人 XU, QIN;HENDERSON, DAVID, A.
分类号 H01L41/00 主分类号 H01L41/00
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