| 摘要 |
PROBLEM TO BE SOLVED: To provide a storage apparatus for preventing degradation in measurement accuracy, by protecting a detection means from the adhesion of oil mist and dust, when the detection means is not in use. SOLUTION: The storage apparatus stores the detection means (a noncontact sensor 20a and a touch probe 20b) for collecting the shape information of an object M to be inspected, when the detection means is not in use. The storage apparatus includes: a protective means (a probe box 30 and an air pump 40) which separates the detection means which is not in use from its surrounding atmosphere; and a dust-collecting means 44 for purifying a clean air supplied to the protective means. COPYRIGHT: (C)2010,JPO&INPIT
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