METHOD FOR PRODUCTION OF SUPERCONDUCTING OXIDE THIN FILM

摘要

Disclosed is a method for producing a superconducting oxide thin film for use in the production of a superconducting wire material. In the method, the superconducting oxide thin film is produced by a metal-organic decomposition method using a fluorine-free metal organic compound as a raw material. Prior to the main firing/heat treatment (S20) for crystallization/heat treatment, an intermediate heat treatment (S10) for decomposing any carbonate contained in a thin film to be subjected to the main firing/heat treatment (S20) is carried out. The intermediate heat treatment (S10) may be carried out in an atmosphere having a carbon dioxide concentration of 10 ppm or less. The metal organic compound may be a metal organic compound containing a ß-diketone complex.