METAL RECOVERING METHOD, METAL RECOVERING APPARATUS, EXHAUST SYSTEM AND FILM FORMING APPARATUS USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a metal recovering apparatus recovering metal components from the exhaust gas discharged from a treatment container, which forms a membrane to the surface of a treatment target, in spite of a simple space saving structure and capable of detoxifying the exhaust gas.

SOLUTION: The metal recovering apparatus 66 is constituted so as to recover metal components from the exhaust gas discharged from the treatment container configured to form the membrane on the surface of the treatment target using a raw material gas comprising a raw material of an organometal compound, to detoxify the exhaust gas and includes a collection unit 80 having a collection member 84 for collecting the metal components contained in the raw material gas by exposing the exhaust gas to high temperature to pyrolyze the unreacted raw material gas contained in the exhaust gas and a detoxifying unit 82 having a catalyst 100 for oxidizing harmful gas components contained in the exhaust gas passed through the collection unit to detoxify it.

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