| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray thickness measuring instrument capable of regularizing a control allowance of a first grid voltage of an X-ray tube, thus suppressing instrumental errors of VI characteristics and standardizing lifetime prediction. SOLUTION: The X-ray thickness measuring instrument, which has the first grid and a second grid and irradiates a sheet member with X-rays emitted from the X-ray tubes in which a tube current is controlled by the first grid voltage to measure a thickness of the sheet member based on the volume of transmission attenuation thereof, includes a variable voltage source connected to the second grid. COPYRIGHT: (C)2010,JPO&INPIT
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