摘要 |
<p>A power semiconductor device (1) comprises a first layer (2) of a first conductivity type, which has a first main side (21) and a second main side (22) opposite the first main side (21). A second layer (3) of a second conductivity type is arranged in a central region of the first main side (21) and a fourth electrically conductive layer (4) is arranged on the second layer (3). On the second main side (22) a third layer (5) with a first zone (1) of the first conductivity type with a higher doping than the first layer (2) is arranged followed by a fifth electrically conductive layer (6). The area between the second layer (3) and the first zone (51) defines an active area (9). The third layer (5) comprises at least one second zone (52) of the second conductivity type, which is arranged in the same plane as the first zone (51). A sixth layer (10) of the first conductivity type with a doping, which is lower than that of the first zone (51) and higher that that of the first layer (2), is arranged between the at least one second zone (52) and the first layer (2).</p> |