| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an acceleration sensing unit and an acceleration sensor having reduced size, and improved accuracy for detecting acceleration. <P>SOLUTION: The acceleration sensing unit includes: a fixed member 6 prevented from being displaced by applying the acceleration; a crystalline element supporting member 5 provided with a movable member 8 supported in the fixed member by a beam 7; and a crystalline stress sensitive element 11 having a stress sensitive section, and fixed ends integrated with both ends of the stress sensitive section. The stress sensing element is an acceleration sensing unit having fixed both ends supported by the fixed member and the movable member. A notch for indicating an orientation of a crystal axis of a crystal or a first alignment index 9 having a marking are asymmetrically disposed in a proper place in the element supporting member. A second alignment index 16 for indicating the orientation of the crystal axis of the crystal is asymmetrically disposed in a proper place in the stress sensitive element. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
