摘要 |
A method for manufacturing a sensor component and a sensor component. The sensor component has a semiconductor substrate and a metal substrate. The semiconductor substrate and the metal substrate are bonded together with the aid of a low-temperature process. A bonding material containing metal particles is applied in a first step to the semiconductor substrate and/or the metal substrate and a sintering process is used in a second step for producing the bond between the semiconductor substrate and the metal substrate.
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