发明名称
摘要 A method for manufacturing a sensor component and a sensor component. The sensor component has a semiconductor substrate and a metal substrate. The semiconductor substrate and the metal substrate are bonded together with the aid of a low-temperature process. A bonding material containing metal particles is applied in a first step to the semiconductor substrate and/or the metal substrate and a sintering process is used in a second step for producing the bond between the semiconductor substrate and the metal substrate.
申请公布号 JP2010506389(A) 申请公布日期 2010.02.25
申请号 JP20090530824 申请日期 2007.09.06
申请人 发明人
分类号 H01L29/84 主分类号 H01L29/84
代理机构 代理人
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