| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a measuring apparatus capable of achieving high measurement accuracy by protecting a position calibrating member from the adhesion of oil mist and dust. Ž<P>SOLUTION: The measuring apparatus for measuring the shape of an object to be inspected includes: a shape sensor 20 for collecting shape information of the object to be inspected; a reference sphere 30 for indicating a reference position when the detection part performs measurements; a housing chamber 31 and an air pump 40 for separating the position calibrating member from its surrounding atmosphere; and a dust-collecting means 44 for purifying a clean air. The dust-collecting means includes: a charging mechanism (an inert gas supplying part and an ionized gas generation part) for charging impurity in an air supplied to a protective means, by spraying a charged inert gas from a direction between a substantially perpendicular direction and the inverse direction to the direction of the flow of the air; and a mesh member charged in the reverse polarity to the polarity of the impurity charged by the charging mechanism, and attracts the charged impurities and supplies the air containing less impurity than the atmosphere outside of the protective means to the protective means. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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