发明名称 |
APPARATUS, SYSTEM AND METHOD FOR CONTROLLING A MATCHING NETWORK |
摘要 |
An apparatus, system and method are described that enable an impedance of a plasma load to be matched with a power generator. In some embodiments the apparatus includes a power output adapted to apply power that is utilized to energize a plasma; a sensor adapted to sample power applied at the power output so as to obtain power samples; and an impedance control output configured to provide, responsive to the power samples, an impedance-control signal that enables an impedance matching network connected to the output of the power generator and to the impedance control output to match, responsive to the an impedance-control signal, the impedance of the plasma to the operating impedance of the power generator. |
申请公布号 |
WO2009137669(A3) |
申请公布日期 |
2010.02.25 |
申请号 |
WO2009US43134 |
申请日期 |
2009.05.07 |
申请人 |
ADVANCED ENERGY INDUSTRIES, INC.;KARLICEK, TOM;VANZYL, GIDCON, J.;SANFORD, LANC |
发明人 |
KARLICEK, TOM;VANZYL, GIDCON, J.;SANFORD, LANC |
分类号 |
H05H1/36;H05H1/24;H05H1/46 |
主分类号 |
H05H1/36 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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