METHOD OF LOCALLY CRYSTALLIZING ORGANIC THIN FILM AND METHOD OF MANUFACTURING ORGANIC THIN-FILM TRANSISTOR USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a method of improving the crystallinity of an organic thin film by locally coating the organic film used as an active layer of an organic thin-film transistor with an organic solvent or locally heat-treating it using a laser. SOLUTION: The method of partially crystallizing the organic thin film includes the steps of (a) forming the organic thin film using an organic semiconductor material; (b) coating a prescribed region of the organic thin film with the organic solvent or changing the organic thin film in the prescribed region into a soft phase by irradiation with a laser beam; and (c) improving the crystallinity of the prescribed region by drying the soft-phase region of the organic thin film for a prescribed time. COPYRIGHT: (C)2010,JPO&INPIT